Lithographic apparatus and device manufacturing method

ABSTRACT

Liquid is supplied to a space between a projection system of a lithographic apparatus and a substrate, but there is a space between the liquid and the substrate. An evanescent field may be formed between the liquid and the substrate allowing some photons to expose the substrate. Due to the refractive index of the liquid, the resolution of the system may be improved and liquid on the substrate may be avoided.

More than one reissue application has been filed for the reissue of Pat.No. 7,012,673. The reissue applications are divisional reissueapplication Ser. No. 13/192,070, continuation reissue application SerNo. 13/192,106, and parent reissue application Ser. No. 12/073,908 (thepresent application), all of which are reissue applications of Pat. No.7,012,673.

This application claims priority from European patent application EP03254116.1, filed Jun. 27, 2003, which is incorporated herein in itsentirety.

FIELD

The present invention relates to a lithographic apparatus and a devicemanufacturing method.

BACKGROUND

The term “patterning device” as here employed should be broadlyinterpreted as referring to any device that can be used to endow anincoming radiation beam with a patterned cross-section, corresponding toa pattern that is to be created in a target portion of the substrate;the term “light valve” can also be used in this context. Generally, thepattern will correspond to a particular functional layer in a devicebeing created in the target portion, such as an integrated circuit orother device (see below). Examples of such a patterning device include:

-   -   A mask. The concept of a mask is well known in lithography, and        it includes mask types such as binary, alternating phase-shift,        and attenuated phase-shift, as well as various hybrid mask        types. Placement of such a mask in the radiation beam causes        selective transmission (in the case of a transmissive mask) or        reflection (in the case of a reflective mask) of the radiation        impinging on the mask, according to the pattern on the mask. In        the case of a mask, the support structure will generally be a        mask table, which ensures that the mask can be held at a desired        position in the incoming radiation beam, and that it can be        moved relative to the beam if so desired.    -   A programmable mirror array. One example of such a device is a        matrix-addressable surface having a viscoelastic control layer        and a reflective surface. The basic principle behind such an        apparatus is that (for example) addressed areas of the        reflective surface reflect incident light as diffracted light,        whereas unaddressed areas reflect incident light as undiffracted        light. Using an appropriate filter, the undiffracted light can        be as filtered out of the reflected beam, leaving only the        diffracted light behind; in this manner, the beam becomes        patterned according to the addressing pattern of the        matrix-addressable surface. An alternative embodiment of a        programmable mirror array employs a matrix arrangement of tiny        mirrors, each of which can be individually tilted about an axis        by applying a suitable localized electric field, or by employing        piezoelectric actuation means. Once again, the mirrors are        matrix-addressable, such that addressed mirrors will reflect an        incoming radiation beam in a different direction to unaddressed        mirrors; in this manner, the reflected beam is patterned        according to the addressing pattern of the matrix-addressable        mirrors. The required matrix addressing can be performed using        suitable electronic means. In both of the situations described        hereabove, the patterning device can comprise one or more        programmable mirror arrays. More information on mirror arrays as        here referred to can be gleaned, for example, from United States        Patents U.S. Pat. No. 5,296,891 and U.S. Pat. No. 5,523,193, and        PCT patent applications WO 98/38597 and WO 98/33096, which are        incorporated herein by reference. In the case of a programmable        mirror array, the support structure may be embodied as a frame        or table, for example, which may be fixed or movable as        required.    -   A programmable LCD array. An example of such a construction is        given in United States Patent U.S. Pat. No. 5,229,872, which is        incorporated herein by reference. As above, the support        structure in this case may be embodied as a frame or table, for        example, which may be fixed or movable as required.        For purposes of simplicity, the rest of this text may, at        certain locations, specifically direct itself to examples        involving a mask and mask table; however, the general principles        discussed in such instances should be seen in the broader        context of the patterning device as hereabove set forth.

Lithographic projection apparatus can be used, for example, in themanufacture of integrated circuits (ICs). In such a case, the patterningdevice may generate a circuit pattern corresponding to an individuallayer of the IC, and this pattern can be imaged onto a target portion(e.g. comprising one or more dies) on a substrate (silicon wafer) thathas been coated with a layer of radiation-sensitive material (resist).In general, a single substrate will contain a whole network of adjacenttarget portions that are successively irradiated via the projectionsystem, one at a time. In current apparatus, employing patterning by amask on a mask table, a distinction can be made between two differenttypes of machine. In one type of lithographic projection apparatus, eachtarget portion is irradiated by exposing the entire mask pattern ontothe target portion at one time; such an apparatus is commonly referredto as a stepper. In an alternative apparatus—commonly referred to as astep-and-scan apparatus—each target portion is irradiated byprogressively scanning the mask pattern under the projection beam in agiven reference direction (the “scanning” direction) while synchronouslyscanning the substrate table parallel or anti-parallel to thisdirection; since, in general, the projection system will have amagnification factor M (generally <1), the speed V at which thesubstrate table is scanned will be a factor M times that at which themask table is scanned. More information with regard to lithographicdevices as here described can be gleaned, for example, from U.S. Pat.No. 6,046,792, incorporated herein by reference.

In a manufacturing process using a lithographic projection apparatus, apattern (e.g. in a mask) is imaged onto a substrate that is at leastpartially covered by a layer of radiation-sensitive material (resist).Prior to this imaging step, the substrate may undergo variousprocedures, such as priming, resist coating and a soft bake. Afterexposure, the substrate may be subjected to other procedures, such as apost-exposure bake (PEB), development, a hard bake andmeasurement/inspection of the imaged features. This array of proceduresis used as a basis to pattern an individual layer of a device, e.g. anIC. Such a patterned layer may then undergo various processes such asetching, ion-implantation (doping), metallization, oxidation,chemo-mechanical polishing, etc., all intended to finish off anindividual layer. If several layers are required, then the wholeprocedure, or a variant thereof, will have to be repeated for each newlayer. Eventually, an array of devices will be present on the substrate(wafer). These devices are then separated from one another by atechnique such as dicing or sawing, whence the individual devices can bemounted on a carrier, connected to pins, etc. Further informationregarding such processes can be obtained, for example, from the book“Microchip Fabrication: A Practical Guide to Semiconductor Processing,”Third Edition, by Peter van Zant, McGraw Hill Publishing Co., 1997, ISBN0-07-067250-4, incorporated herein by reference.

For the sake of simplicity, the projection system may hereinafter bereferred to as the “projection lens”; however, this term should bebroadly interpreted as encompassing various types of projection system,including refractive optics, reflective optics, and catadioptricsystems, for example. The radiation system may also include componentsoperating according to any of these design types for directing, shapingor controlling the projection beam of radiation, and such components mayalso be referred to below, collectively or singularly, as a “lens.”Further, the lithographic apparatus may be of a type having two or moresubstrate tables (and/or two or more mask tables). In such “multiplestage” devices the additional tables may be used in parallel, orpreparatory steps may be carried out on one or more tables while one ormore other tables are being used for exposures. Dual stage lithographicapparatus are described, for example, in U.S. Pat. No. 5,969,441 and WO98/40791, incorporated herein by reference.

It has been proposed to immerse the substrate in a lithographicprojection apparatus in a liquid having a relatively high refractiveindex, e.g. water, so as to fill a space between the final element ofthe projection system and the substrate. The point of this is to enableimaging of smaller features since the exposure radiation will have ashorter wavelength in the liquid. (The effect of the liquid may also beregarded as increasing the effective NA of the system.)

However, submersing the substrate or substrate and substrate table in abath of liquid (see for example U.S. Pat. No. 4,509,852, herebyincorporated in its entirety by reference) means that there is a largebody of liquid that must be accelerated during a scanning exposure. Thisrequires additional or more powerful motors and turbulence in the liquidmay lead to undesirable and unpredictable effects.

One of the solutions proposed is for a liquid supply system to provideliquid on a localized area of the substrate and in between the finalelement of the projection system and the substrate (the substrategenerally has a larger surface area than the final element of theprojection system). One way which has been proposed to arrange for thisis disclosed in WO 99/49504, hereby incorporated in its entirety byreference. As illustrated in FIGS. 2 and 3, liquid is supplied by atleast one inlet IN onto the substrate, preferably along the direction ofmovement of the substrate relative to the final element, and is removedby at least one outlet OUT after having passed under the projectionsystem. That is, as the substrate is scanned beneath the element in a −Xdirection, liquid is supplied at the +X side of the element and taken upat the −X side. FIG. 2 shows the arrangement schematically in whichliquid is supplied via inlet IN and is taken up on the other side of theelement by outlet OUT which is connected to a low pressure source. Inthe illustration of FIG. 2 the liquid is supplied along the direction ofmovement of the substrate relative to the final element, though thisdoes not need to be the case. Various orientations and numbers of in-and out-lets positioned around the final element are possible, oneexample is illustrated in FIG. 3 in which four sets of an inlet with anoutlet on either side are provided in a regular pattern around the finalelement to form a liquid reservoir.

However this and other immersion lithography proposals can incur severaldifficulties. For example, the effect of immersion liquid on resistchemistry is unknown and outgassing of the resist could cause bubbles inthe immersion liquid. Bubbles in the immersion liquid would alter thecourse of the radiation and thus affect the uniformity of the exposure.Furthermore, even with protective measures, the problem of mechanicaldisturbances due to coupling between the projection apparatus and thesubstrate via the immersion liquid remains significant.

An alternative method to improve the resolution of lithographicapparatus, as described by L. P. Ghislain et al. in “Near-FieldPhotolithography with Solid Immersion Lens,” App. Phys. Lett. 74,501-503. (1999), is to provide a solid immersion lens with a highrefractive index between the projection system and the substrate. Theprojection beam is focused on the solid immersion lens and the radiationpropagates to the resist through a very thin air (or other gas) gapusing an evanescent field (near-field operation mode). The distancebetween the solid lens and the substrate is made sufficiently small(i.e. less than the wavelength of the radiation) that some photons aretransmitted across the gap and the substrate is exposed. This proposalobviously relies on a very small gap between the substrate and the solidlens and the chances of a crash between the two are high.

SUMMARY

Accordingly, it would be advantageous, for example, to provide analternative method and apparatus with improved resolution. Thealternative method and apparatus may alleviate some of the disadvantagesof the presence of liquid or the presence of a solid lens.

According to an aspect of the invention, there is provided alithographic apparatus comprising:

-   -   an illumination system arranged to condition a radiation beam;    -   a support structure configured to hold a patterning device, the        patterning device being capable of imparting the radiation beam        with a pattern in its cross-section;    -   a substrate table configured to hold a substrate;    -   a projection system arranged to project the patterned radiation        beam onto a target portion of the substrate; and    -   a liquid supply system configured to supply a liquid between the        projection system and the substrate and arranged, such that in        use, there is a space not occupied by liquid between the liquid        and the substrate.

Problems that may result from the contact between the liquid and thesubstrate, such as the effect on resist chemistry and outgassing of theresist can be avoided by having a space not occupied by liquid betweenthe liquid and the substrate. Even if a crash occurs between the liquidand the substrate the consequences will not be as serious as a crashbetween a solid lens and the substrate. The liquid may be dispersed inthe system but the substrate will likely not be permanently damaged andthe lithographic apparatus will likely not need major repair work.Arrangements to catch liquid dispersed in the event of a crash mayeasily be provided.

The liquid supply system can include elements to control the position,quantity, shape, flow rate or any other features of the liquid.

A distance between the liquid and the substrate is, in an embodiment,smaller than the wavelength of the radiation and, in an embodiment, lessthan 100 nm. The distance between the liquid and the substrate should becarefully monitored because if the distance is too great insufficientradiation may be transmitted to the substrate. The distance should alsobe as uniform as possible to prevent variation in the amount ofradiation transmitted. Similarly, the depth of the liquid should bemonitored as it affects the focal plane of the entire projection system.Both the distance between the liquid and the substrate and the depth ofthe liquid should be carefully regulated such that any variations can becompensated for.

To prevent erroneous and unquantified refraction of the radiation, thesurface of the liquid closest to the substrate should be substantiallyparallel to the substrate.

To confine the liquid to form a liquid lens, the liquid supply systemmay comprise a hydrophobic surface. The hydrophobic surface may, in anembodiment, be of a substantially annular shape to form the liquid lensin the center of the annulus. In an embodiment, a radiation-transmissivehydrophilic surface configured to define the shape of the liquid may beprovided. In an embodiment, the hydrophilic surface fills the hole atthe center of the annular hydrophobic surface. A metallic electrode mayalso be used to adjust the shape (including diameter) of the liquid.

For ease of use, the lithographic apparatus may be arranged such thatthe substrate table is vertically above the projection system.

According to a further aspect of the invention, there is provided adevice manufacturing method comprising:

-   -   providing a liquid between a projection system of a lithographic        apparatus and a substrate, the liquid forming a liquid lens; and    -   projecting a patterned radiation beam through the liquid, then        through a space, and then onto a target portion of the substrate        using the projection system.

Although specific reference may be made in this text to the use of theapparatus according to the invention in the manufacture of ICs, itshould be explicitly understood that such an apparatus has many otherpossible applications. For example, it may be employed in themanufacture of integrated optical systems, guidance and detectionpatterns for magnetic domain memories, liquid-crystal display panels,thin-film magnetic heads, etc. The skilled artisan will appreciate that,in the context of such alternative applications, any use of the terms“reticle”, “wafer” or “die” in this text should be considered as beingreplaced by the more general terms “mask”, “substrate” and “targetportion”, respectively.

In the present document, the terms “radiation” and “beam” are used toencompass all types of electromagnetic radiation, including ultravioletradiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm).

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in which:

FIG. 1 depicts a lithographic projection apparatus according to anembodiment of the invention;

FIG. 2 depicts a liquid supply system according to an embodiment of theinvention;

FIG. 3 is an alternative view of the liquid supply system of FIG. 2;

FIG. 4 depicts a detail of a lithographic projection apparatus accordingto an embodiment of the invention; and

FIG. 5 depicts a detail of an alternative embodiment of a lithographicprojection apparatus according to the invention.

In the Figures, corresponding reference symbols indicate correspondingparts.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic projection apparatusaccording to a particular embodiment of the invention. The apparatuscomprises:

-   -   a radiation system Ex, IL, for supplying a projection beam PB of        radiation (e.g. UV radiation), which in this particular case        also comprises a radiation source LA;    -   a first object table (mask table) MT provided with a mask holder        for holding a mask MA (e.g. a reticle), and connected to a first        positioning device for accurately positioning the mask with        respect to item PL;    -   a second object table (substrate table) WT provided with a        substrate holder for holding a substrate W (e.g. a resist-coated        silicon wafer), and connected to a second positioning device for        accurately positioning the substrate with respect to item PL;    -   a projection system (“lens”) PL (e.g. a refractive lens system)        for imaging an irradiated portion of the mask MA onto a target        portion C (e.g. comprising one or more dies) of the substrate W.

As here depicted, the apparatus is of a transmissive type (e.g. has atransmissive mask). However, in general, it may also be of a reflectivetype, for example (e.g. with a reflective mask). Alternatively, theapparatus may employ another kind of patterning device, such as aprogrammable mirror array of a type as referred to above.

The source LA (e.g. a laser-produced or discharge plasma source)produces a beam of radiation. This beam is fed into an illuminationsystem (illuminator) IL, either directly or after having traversedconditioning means, such as a beam expander Ex, for example. Theilluminator IL may comprise adjusting means AM for setting the outerand/or inner radial extent (commonly referred to as σ-outer and σ-inner,respectively) of the intensity distribution in the beam. In addition, itwill generally comprise various other components, such as an integratorIN and a condenser CO. In this way, the beam PB impinging on the mask MAhas a desired uniformity and intensity distribution in itscross-section.

It should be noted with regard to FIG. 1 that the source LA may bewithin the housing of the lithographic projection apparatus (as is oftenthe case when the source LA is a mercury lamp, for example), but that itmay also be remote from the lithographic projection apparatus, theradiation beam which it produces being led into the apparatus (e.g. withthe aid of suitable directing mirrors); this latter scenario is oftenthe case when the source LA is an excimer laser. The current inventionand claims encompass both of these scenarios.

The beam PB subsequently intercepts the mask MA, which is held on a masktable MT. Having traversed the mask MA, the beam PB passes through theprojection lens PL, which focuses the beam PB onto a target portion C ofthe substrate W. With the aid of the second positioning device (and aninterferometric measuring device IF), the substrate table WT can bemoved accurately, e.g. so as to position different target portions C inthe path of the beam PB. Similarly, the first positioning device can beused to accurately position the mask MA with respect to the path of thebeam PB, e.g. after mechanical retrieval of the mask MA from a masklibrary, or during a scan. In general, movement of the object tables MT,WT will be realized with the aid of a long-stroke module (coursepositioning) and a short-stroke module (fine positioning), which are notexplicitly depicted in FIG. 1. However, in the case of a stepper (asopposed to a step-and-scan apparatus) the mask table MT may just beconnected to a short stroke actuator, or may be fixed.

The depicted apparatus can be used in two different modes:

-   -   1. In step mode, the mask table MT is kept essentially        stationary, and an entire mask image is projected in one go        (i.e. a single “flash”) onto a target portion C. The substrate        table WT is then shifted in the x and/or y directions so that a        different target portion C can be irradiated by the beam PB;    -   2. In scan mode, essentially the same scenario applies, except        that a given target portion C is not exposed in a single        “flash.” Instead, the mask table MT is movable in a given        direction (the so-called “scan direction”, e.g. the y direction)        with a speed ν, so that the projection beam PB is caused to scan        over a mask image; concurrently, the substrate table WT is        simultaneously moved in the same or opposite direction at a        speed V=Mν, in which M is the magnification of the projection        lens PL (typically, M=¼ or ⅕). In this manner, a relatively        large target portion C can be exposed, without having to        compromise on resolution.

As shown in FIGS. 4 and 5, the substrate table WT is above theprojection system PL (although as discussed hereafter it need not be).High precision liquid supply system 18 is provided to supply liquid viaduct 17 to a space between the projection system PL and the substratetable WT. The liquid has a refractive index n and forms a liquid lens 10or reservoir. The lens 10 is formed around the image field of theprojection system PL so that liquid is confined to a space between thesubstrate surface and the final element of the projection system PL.

A band of a hydrophobic material 22 (e.g. a coating) is adhered to theliquid supply system 18 which confines liquid in the lens 10.Additionally, the surface of the projection system PL disposed towardsthe substrate surface comprises a radiation-transmissive hydrophilicmaterial 23 (e.g. a coating) to ensure the lens 10 adheres to theprojection system. The specific choice of hydrophobic and hydrophilicmaterials is dependent on the liquid. For example, when usingsubstantially water as the liquid, glass has been found to be a suitablehydrophilic material and Teflon a suitable hydrophobic material. Otherfactors such as the degree of roughness of the surface can also be usedto improve the hydrophobic quality of a material.

A liquid sensor 24 senses the depth of the liquid lens 10 and the highprecision liquid supply system 18 provides enough liquid tosubstantially fill the space between the projection system PL and thesubstrate W, but such that there is a gap between the substrate W andthe liquid lens 10 of less than the wavelength of the projectionradiation. Liquid sensor 24 forms part of a feedback system in whichmore liquid can be provided into the lens 10 by the high precisionliquid supply system 18 when the depth is insufficient and liquid can beremoved from the lens 10 by an outlet 14 (or one of the ducts 17 can beused as an outlet) when the depth is too great. The liquid sensor 24works by sensing radiation from within the liquid lens 10 and usinginternal reflections from surfaces of the liquid lens to determine thedepth of the lens. As the distance between the projection system PL andthe substrate W can either be set or alternatively easily measured, thegap between the lens 10 and the substrate W can be calculated by simplysubtracting the depth of the lens 10 from the total distance between theprojection system PL and the substrate W. Alternatively these distancescan be measured by measuring the capacitance between electrodes on, forexample, the substrate table WT and the projection system PL.

Radiation is thus projected through the liquid lens 10 and an evanescentfield is formed between the substrate W and the surface of the liquidlens 10 disposed towards the substrate surface. The resolution of thesystem is therefore improved by a factor of n.

The lens 10 should, in an embodiment, have a large flat surface toprevent erroneous refraction of the radiation. By charging (e.g.,metallic) electrodes 28 under the hydrophobic material, the shape (formand size of the liquid lens) can be adjusted appropriately. For example,the lens 10 can be adjusted to have a large diameter to provide a largeflat area at the center.

Alternatively or additionally to the hydrophobic material 22 and/orhydrophilic material 23, a gas seal 16 may be used to confine the liquidin the lens 10. As shown in FIG. 5, the gas seal is formed by gas, e.g.air, synthetic air, N₂ or another inert gas, provided under pressure viainlet 15 to the gap between the high precision liquid supply system 18and the substrate W and extracted via outlet 14. An overpressure on thegas inlet 15, vacuum level on the outlet 14 and geometry of the gap arearranged so that there is a high-velocity gas flow inwards that confinesthe liquid.

If the lens 10 is sufficiently small, a lithographic apparatus with theprojection system PL above the substrate table WT, as shown in FIG. 1can be used. Surface tension and adhesion forces compensate for theforce of gravity and the lens 10 remains adhered to the projectionsystem PL leaving a space between the lens 10 and the substrate W.

Another liquid supply system which has been proposed, as described inU.S. patent application U.S. Ser. No. 10/705,783, is to provide theliquid supply system with a seal member which extends along at least apart of a boundary of the space between the final element of theprojection system and the substrate table. The seal member issubstantially stationary relative to the projection system in the XYplane and a seal is formed between the seal member and the surface ofthe substrate. In an embodiment, the seal is a contactless seal such asa gas seal.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. The description is not intended to limit theinvention.

1. A lithographic projection apparatus comprising: an illuminationsystem arranged to condition a radiation beam; a support structureconfigured to hold a patterning device, the patterning device beingcapable of imparting the a radiation beam with a pattern in itscross-section; a substrate table configured to hold a substrate; aprojection system arranged to project the patterned radiation beam ontoa target portion of the substrate; and a liquid supply system configuredto supply a liquid between the projection system and the substrate andarranged, such that in use, there is a space not occupied by liquidbetween the liquid and the substrate.
 2. An apparatus according to claim1, wherein a distance between the liquid and the substrate is smallerthan the wavelength of the radiation beam.
 3. An apparatus according toclaim 1, wherein a distance between the liquid and the substrate is lessthan 100 nm.
 4. An apparatus according to claim 1, wherein the majorityof the surface of the liquid closest to the substrate is substantiallyparallel to the substrate.
 5. An apparatus according to claim 1, whereinthe liquid supply system comprises a hydrophobic surface configured todefine a shape of the liquid.
 6. An apparatus according to claim 5,wherein the hydrophobic surface is of annular shape.
 7. An apparatusaccording to claim 1, comprising a radiation-transmissive hydrophilicsurface configured to define a shape of the liquid.
 8. An apparatusaccording to claim 7, wherein the radiation-transmissive hydrophilicsurface is circular, filling a hole at the center of an annularhydrophobic surface.
 9. An apparatus according to claim 1, wherein, inuse, the substrate table is vertically above the projection system. 10.An apparatus according to claim 1, comprising an electrode configured toadjust the shape of the liquid.
 11. A device manufacturing methodcomprising: providing a liquid between a projection system of alithographic apparatus and a substrate, the liquid forming a liquidlens; and projecting a patterned radiation beam through the liquid, thenthrough a space, and then onto a target portion of the substrate usingthe projection system.
 12. A method according to claim 11, wherein adistance between the liquid and the substrate is smaller than thewavelength of the radiation beam.
 13. A method according to claim 11,wherein a distance between the liquid and the substrate is less than 100nm.
 14. A method according to claim 11, wherein the majority of thesurface of the liquid closest to the substrate is substantially parallelto the substrate.
 15. A method according to claim 11, comprisingdefining a shape of the liquid using a hydrophobic surface.
 16. A methodaccording to claim 15, wherein the hydrophobic surface is of annularshape.
 17. A method according to claim 11, comprising defining a shapeof the liquid using a radiation-transmissive hydrophilic surface.
 18. Amethod according to claim 17, wherein the radiation-transmissivehydrophilic surface is circular, filling a hole at the center of anannular hydrophobic surface.
 19. A method according to claim 11,wherein, in use, the substrate is vertically above the projectionsystem.
 20. A method according to claim 11, comprising adjusting theshape of the liquid using an electrode.
 21. A lithographic projectionapparatus comprising: an illumination system arranged to condition aradiation beam; a support structure configured to hold a patterningdevice, the patterning device being capable of imparting the a radiationbeam with a pattern in its cross-section; a substrate table configuredto hold a substrate; a projection system arranged to project thepatterned radiation beam onto a target portion of the substrate; and aliquid supply system configured to supply a peripherally confinedportion of liquid between the projection system and the substrate, thesubstrate being vertically above the configured portion of the liquid,and wherein a space exists between the confined portion of liquid andthe substrate.